On Decreasing of Mismatch-Induced Stresses in a Hetero Structure by Preliminary Processing of Substrate

Pankratov EL

Published on: 2026-08-30

Abstract

In this paper we introduce an approach to decrease mismatch-induced stress in a heterostructure by using radiation pro-cessing of substrate before growth of epitaxial layers from gas phase. In the framework of the approach the mismatch-induced stresses in the heterostructure one can also find acceleration of recombination and diffusion of radiation defects from the dam-aged region during growth from gas phase at high temperature. We also consider an analytical approach for analyzing of mass and heat transfer. The approach gives a possibility to take into account simultaneously spatial and temporal variations of parameters of mass transfer. At the same time the approach gives a possibility to take into account nonlinearity of considered processes..